Awarded
Deep Reactive Ion Etching (DRIE) Si fluorine chemistry etcher
- Contract value
- no value published
- Bids received
- 1
- Published
- 9 Jun 2026
- Awarded
- 9 Jun 2026
- Contract start
- 9 Jun 2026
- Contract end
- 14 Aug 2026estimated
- Region
- Sachsen (DED21)
Awarded