Awarded
Studie zur Verwendung von laborbasierten EUV-Strahlungsquellen zur Untersuchung von Degradations- und Kontaminationsprozessen mittels in-situ Messverfahren - Phase 2 - PR1171190-2310-I
- Winners
- RWTH Aachen University
- Contract value
- no value published
- Bids received
- 1
- Published
- 7 Aug 2026
- Awarded
- 7 Aug 2026
- Contract start
- 8 Aug 2026
- Contract end
- 31 Dec 2029stated